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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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KLA-Tencor Surfscan 6200 particle counter |
| Model |
SFS 6200 |
Maker |
KLA TENCOR |
| Wafer Size |
8"
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Vintage |
1994-7 |
| Sell Status |
SELL
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Tool's Condition |
Operational
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| Description |
*.Configuration:
- Wafer Size : 4 - 8 inch.
- Non-patterned surface Inspection System.
- 0.1 micron Defect Sensitivity (PSL STD).
- 0.02 ppm Haze Sensitivity.
- 0.002 ppm Haze Resolution.
- Accuracy within 1%.
- XY coordinates.
- Lock Down accessories.
- Tencor approved blower assembly.
- 30mW New Ar-Laser
- 208V/60HZ, 17A.
- MS-DOS 6.22 ,Windows 3.1.
- Software version: 2.1.
*. Installed in Clean-room.. |
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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