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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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SSM 150 Auto Spreading Resistance Probe (ASRP) |
| Model |
SSM150 |
Maker |
SOLID STATE MEASRUEMENT INC. |
| Wafer Size |
Other
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Vintage |
1998- |
| Sell Status |
SELL
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Tool's Condition |
Excellent
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| Description |
*. Process: Spreading resistance probe
*. Measurement perfomance:
- Resistivity and Dopant concentration
- Resistance measurement & Carrier concentration profile analysis in all structures of silicon
Resistance: 1 1 to >E10
Resistivity: 10-昂目cm~4x10昂
Dopant Concentration: >10昌易cm-昆 to < 10易易cm-昆
*. Measurement configuration:
- Carrier concentration profile analysis & Depth measurement
*. Hardware configuration:
- Standard Microscope/Probe Assembly Test Unit
- Electronics Cabinet with Probe Unit, Pneumatics Control, etc
- Probe subsystem with Anti-Vibration table
- Optic Fiber Light Sources and Holder
- IBM Computer Package & LCD Color monitor
- 110V/50/60Hz
*. Software configuration:
- Operation System: MS DOS 3.3
- Operation Software: D150 Version 5.12
*. Accessory (Option):
- Lapping Machine (manual), Probe set, QTA/PEN, Gorey-Schnider grinder,Angle dies,others
Calibration STD sets
*. Fully refurbished.
*. Installed
*. Available Demo Test and Inspection |
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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