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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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Nanometrics Nanospec 4150 Film Thickness Measurement |
| Model |
NANOSPEC 4150 |
Maker |
NANOMETRICS |
| Wafer Size |
8"
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Vintage |
- |
| Sell Status |
SELL
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Tool's Condition |
Excellent
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| Description |
Wafer Size : Up to 200mm
Automatic Stage & Stage controller with twin chuck (4 ~ 8" wafer size)
UV lamp housing & Deuterium Lamp Power Supply
Auto focus : Not available (Image capture board to be repaired)
Wavelength : Visible 400~900nm , 200~900nm with UV (option)
Acuracy : Within ‐ 1% (Oxide Standard)
Precision : 2（, 500~50,000（ Visible /1（, 25~500（ UV option
Stability : 0.5% or 5（ or whichever is greater
Data analysis : Mapping contour 2D and 3D / Statistical Process Control (SPC) |
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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