Metrology
 
 HOME >Tool's Information
Tool's Specification.
Tool Name Hitachi S-5500 In-lens FE SEM
Model S-5500 Maker HITACHI
Wafer Size Other Vintage -
Sell Status SELL Tool's Condition Good
Description In-lens Field Emission Scanning Electron Microscope.

Imgae Resolution :
- 0.4nm guaranteed at accelerating voltage 30kV
- 1.6nm guaranteed at accelerating voltage 1kV

Magnification :
- LM Mode 60X~100,0000X
- HM Mode 800X~2,000,000X
       
  - Address: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
  - Phone: 82-41-554-6920~1 FAX: 82-41-554-6922