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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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SSM 5200 Automatic CV System for CV/QV/IV measurement |
| Model |
SSM5200 |
Maker |
SOLID STATE MEASRUEMENT INC. |
| Wafer Size |
8"
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Vintage |
1997- |
| Sell Status |
SELL
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Tool's Condition |
AS-IS
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| Description |
Fully automated capacitance-voltage(CV),charge-voltage(QV), and current-voltage(IV) system
[Direct Measurement]
- Accurately measure CV, QV and IV characteristics of MOS test structures in scribe lines on product wafers.
[Pattern Recognition]
- Vision system for fast pattern recognition for automatic placement of measurement probe.
[Cassette-To-Cassette Loading/Unloading]
- Robotic loading and unloading of wafers with flat or notch alignment.
Fast - Effective oxide charge and carrier density measurements in 50seconds, ion implant dose in 20 seconds.
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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