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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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*KLA-Tencor Archer AIM+ Overlay Metrology |
| Model |
Archer AIM+ |
Maker |
KLA TENCOR |
| Wafer Size |
12"
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Vintage |
2006- |
| Sell Status |
SOLD
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Tool's Condition |
Refurbished
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| Description |
Currently 12" configured,
( Available size conversion for 8" open cassette handling )
Overlay measurement for กร45 nm technology nodes
Archer AIM+ Main :
Industrial PC & LCD monitor
Software Version(OS) : Windows XP,V2002SP1
Software Version(APP) : Archer 5.50.03P01
AIM
Multilayer
ANRA
BFCD
CPM
VIS Color Filter
E40E90E94
E87
GEM
Target diagnostic
XY Separation
Imageless
Kawasaki Robot & Robot controller
TDK TAS300 Loadport (Triple)
Installed in our cleanroom.
Demo test available
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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