Metrology
 
 HOME >Tool's Information
Tool's Specification.
Tool Name N&K 5700 CDRT Metrology system
Model N&K 5700 CDRT Maker N&K
Wafer Size Other Vintage 2006-11
Sell Status SELL Tool's Condition Excellent
Description Broadband spectrometry for film thickness and trench profile measurements on photomask reticles.

Spotsize: R = 50um, T < 400um

The n&k 5700-CDRT automated system is designed for handling 5Ħħ or 6Ħħ square masks.

The n&k 5700-CDRT simultaneously determines thickness, n and k in the spectral range of 190-1000nm, and trench profile. These systems provide non-destructive, real time, high throughput measurements directly on the device and collect polarized reflectance and transmission data (in the spectral range from 190-1000 nm) at the same point. These systems encompass advanced pattern recognition software, patented microspot measurement technology and a unique all-reflective optical based system.

This system includes a polarizer and special trench analysis software and provides non-destructive, real-time measurements of CD, trench depth, and profile.
     
  - Address: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
  - Phone: 82-41-554-6920~1 FAX: 82-41-554-6922