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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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SDI/SEMILAB FAaST 200-SL CV/IV Measurement |
| Model |
FAaST 200 SL |
Maker |
SDI/SEMILAB |
| Wafer Size |
8"
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Vintage |
- |
| Sell Status |
SELL
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Tool's Condition |
AS-IS
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| Description |
non-contact electrical C-V & I-V measurement system capable of measuring on product wafers.
Measurements can be made in scribe line test sites or in the active cell area.
Cell measurements allow for the first time in-line electrical monitoring of topology related processing issues.
Major applications include measurements of SiO2, Nitrided Oxides, advanced high-K and low-K dielectrics |
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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