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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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Tencor P-12 Step Height Measurement System |
| Model |
P-12 |
Maker |
KLA TENCOR |
| Wafer Size |
8"
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Vintage |
1996-12 |
| Sell Status |
SELL
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Tool's Condition |
Excellent
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| Description |
P12 Long Scan Profiler (Step Height Measurement)
- 8" chuck
- Micro Head II with L type stylus (Red 12.5 um).
- Measurement Range: 6.5зн,26зн,131зн.
- Scan Length: 150mm.
- Scan Speed : 1зн ~ 25 mm/sec.
- Stylus Force: 0.05 ~50mg.
- Motorized X-Y stage
- OS Windows 3.1, - S/W Version: 3.1.9
- Utility: Vacuum.
- Power: 110V/50HZ, 4A.
- Installed in Clean-room. |
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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