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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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N&K 3700 RT Metrology System |
| Model |
N&K 3700 RT |
Maker |
N&K |
| Wafer Size |
8"
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Vintage |
2004-7 |
| Sell Status |
SELL
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Tool's Condition |
AS-IS
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| Description |
Broadband spectrometry for film thickness on transparent substrates, including photomask reticles.
Spotsize: R = 50um, T < 400um
The n&k 3700-RT automated system is designed for handling 5Ħħ or 6Ħħ square masks or up to 8Ħħ square samples.
These systems can also be configured for transparent wafers.
The n&k 3700-RT simultaneously determines thickness, and n and k in the spectral range of 190-1000nm and provide non-destructive, real time, high throughput measurements directly on the device. This system collects reflectance and transmission data (in the spectral range from 190-1000 nm) at the same point and encompasses advanced pattern recognition software, patented microspot measurement technology and a unique all-reflective optical based system. |
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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