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°èÃø Àåºñ ÆǸŠ¹× ±â¼ú ¼ºñ½º
- KLA-Tencor(Surfscan 6200,6220,6420,sp1 ¡¦)
- KLA-Tencor(Profiler P-2, P-2H, P-10, P-11, P-20H, ¡¦)
- Prometrix(Rs 35, 50, 55, 75, vp10 ¡¦)
- Bio-Rad(QS 300,408,500 ¡¦)
- SSM Hg CV(490i, 495, 5100, 5130 ¡¦) / SSM 150 / NanoSRP 2000
- ADE 9300/9350/9500/9600 ¡¦
- Thermawave, Rigaku, Nanometrics, N&K(N&K 1700 analyzer)
- Rudolph, Leica / Nikon/Olympus,¡¦
Epitaxial Àåºñ ÆǸŠ¹× ±â¼ú ¼ºñ½º
- AMAT 7810/7700, G2/G3HT,ASM Epsilon, LPE2061
Furnace ¼Â¾÷ ¹× ±â¼ú ¼ºñ½º
- Thermco Horizontal Furnace(HTR 4304, 4504, 4904, 5104, 5204, ¡¦)
Turnkey Base FAB Construction & Servcice
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ÃøÁ¤ ¹× ºÐ¼® ¼ºñ½º
- Auto Spreading Resistance Profile Analysis ( Junction Depth & Doping Profile )
- N/P Type Measurement
- Thin film Measurement & Analysis
- Particle Measurement on wafer surface (Bare)
- Vertical Structure Analysis (SEM)
*ÀÎÁõ Ç¥ÁØ Âü°í ÀÚ·á·Î º¸Á¤
Software Backup ¼ºñ½º
- Software Install & upgrade, data backup service
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- Ãæû³²µµ õ¾È½Ã µ¿³²±¸ ÅëÁ¤3·Î 3 (ÁÖ)Á¦³×½Ã½º ¿ì)31208 TEL: 041-554-6920~1 FAX: 041-554-6922 |
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