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设备信息
设备名称 N&K 1700 Trench Depth & Thin film thickness Measurement
型号 N&K 1700 制造商 N&K
晶元尺寸 6" Vintage -
销售状态 销售中 设备状态 Operational
数据 *. Film Thickness and Trench profile measurement.
*. Manual load Metrology system.
*. Wafer: 4", 6", 8".
*. Spotsize: 50um.
*. Simultaneously determine thickness, n and k in the spectral range of 190-1000nm, trench profile and provide non-destructive, real time, high throughput measurements directly on the device.
*. Manual & Install software.
*. Pattern recognition software.
*. Installed in Clean-room.
 
  - 总公司: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
  - 电话: 82-41-554-6920~1 传真: 82-41-554-6922