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 HOME >设备信息 |
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设备信息
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设备名称
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KLA-Tencor Surfscan 6200 particle counter |
| 型号 |
SFS 6200 |
制造商 |
KLA TENCOR |
| 晶元尺寸 |
8"
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Vintage |
1994-7 |
| 销售状态 |
销售中
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设备状态 |
Operational
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| 数据 |
*.Configuration:
- Wafer Size : 4 - 8 inch.
- Non-patterned surface Inspection System.
- 0.1 micron Defect Sensitivity (PSL STD).
- 0.02 ppm Haze Sensitivity.
- 0.002 ppm Haze Resolution.
- Accuracy within 1%.
- XY coordinates.
- Lock Down accessories.
- Tencor approved blower assembly.
- 30mW New Ar-Laser
- 208V/60HZ, 17A.
- MS-DOS 6.22 ,Windows 3.1.
- Software version: 2.1.
*. Installed in Clean-room.. |
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- 总公司:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- 电话:
82-41-554-6920~1 传真: 82-41-554-6922
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