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设备信息
设备名称 KLA-Tencor Surfscan 6200 particle counter
型号 SFS 6200 制造商 KLA TENCOR
晶元尺寸 8" Vintage 1994-2
销售状态 销售中 设备状态 Excellent
数据 *.Configuration:
- Wafer Size : 4 - 8 inch.
- Non-patterned surface Inspection System.
- 0.1 micron Defect Sensitivity (PSL STD).
- 0.02 ppm Haze Sensitivity.
- 0.002 ppm Haze Resolution.
- Accuracy within 1%.
- XY coordinates.
- Lock Down accessories.
- Tencor approved blower assembly.
- 30mW New Ar-Laser
- 208V/60HZ, 17A.
- Windows 3.1.
- Software version: 2.1

*. Fully refurbished.
*. Installed in Clean-room.
*. Can demonstrate any time.
   
  - 总公司: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
   - 电话: 82-41-554-6920~1 传真: 82-41-554-6922