Metrology
 
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设备信息
设备名称 SSM 2000
型号 SSM2000 制造商 SOLID STATE MEASRUEMENT INC.
晶元尺寸 Other Vintage -
销售状态 销售中 设备状态 Refurbishing
数据 System Measurement Performance
- Spreading Resistance Dynamic Range : 1Ω to > 10Ω
- Reistivity : 10-⁴~ 4x10⁴Ωcm
- Concentration : E11 cm-3 ~ E21 cm-3

Computer Subsystem
- Operating System : Window XP
- Image Capture : Matrox Pulsar Frame Grabber / Video Controller
- Application S/W : NanoSRP'" software

Automated Features
•;; Probe conditioning /•;; Probe calibration /•;; Sample alignment /•;; Unattended operation
( (NanoSRP™ Bevel Edge Alignment Tool )

Probing Subsystem with multiple sample fixture
- Probe Spacing : Minimum 65 µ;;m (Standard)
- Probe Load : 10g (standard)
- Sample Mounts : Up to 6 samples
- Vision System : DIC / 5x, 10x, 20x, 50x objectives / Cohu 2100 series CCIR/RAL gray scale camera
- Stage Motion : 80 mm X/Y/Z-axis range (80mm/90mm/3mm)
- Vibration Damping Table

Accessories
- Mounted probes / Bevel Sample Mounts /Grinding jig / Heat sink for sample mounting /Mounting wax /0.05 or 0.1 um Diamond compound
- Measurement fixture: 6 position
- Conventional probe conditioning fixture :
QTA/P probe qualification samples / Probe Shaper Tool / Probe Cleaner Tool / Gorey-Schneider probe grinder


*. To be refurbished.
       
  - 总公司: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
   - 电话: 82-41-554-6920~1 传真: 82-41-554-6922