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设备信息
设备名称 N&K OptiPrime - CD
型号 OptiPrime - CD 制造商 N&K
晶元尺寸 8" Vintage 2015-
销售状态 销售中 设备状态 Excellent
数据 Key Qualities of OptiPrime - CD

■ Optimized Polarized Reflectance (Rs and Rp) Data
- Wavelength Range: 190 - 1000 nm
- Micro-Spot Technology
■ Can be configured for 200 mm (8”),and 150 mm (6”) Wafers
■ Fully Automated
■ Based on Patented Reflective Optics that Optimizes the Signal-to-Noise Ratio
■ Strong Sensitivity to Sub-Nanometer Structural and Material Variations
- Thickness, n and k (from 190 –; 1000 nm)
■ OCD Metrology for 2-D and 3 -D Structures
(Trenches and Contact Holes)
- Depth, CD, Profile
■ Cognex Pattern Recognition Software
■ No Re-Alignment Issues Upon Light Bulb Replacement
■ Modular design –; Easy to Maintain and Service
■ GEM/SECS Communication Interface
■ SEMI Standard and Third Party Certifications

■ Dimensions (W x D x H): 112 cm x 202 cm x 189 cm
■ Weight (unpacked): 770 Kg
■ Facility Requirements:
100 - 240 V, 50/60 Hz, 1Φ
Vacuum, CDA (for FOUP Load Port)

*** Installed in cleanroom,Excellent working condition.
System performance check data:
1) Total Baseline Fluctuation : 0.55 ( spec < 0.75 )
2) Thickness Repeatability : 0.24Å ( spec < 1.0 Å,1σ)
   
  - 总公司: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
   - 电话: 82-41-554-6920~1 传真: 82-41-554-6922