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设备信息
设备名称 Tencor P-16+ stylus surface profiler
型号 P16+ 制造商 KLA TENCOR
晶元尺寸 8" Vintage 2012-3
销售状态 销售中 设备状态 Excellent
数据 The KLA-Tencor P-16+ Profiler is a highly sensitive surface profiler that
measures step height, roughness, and waviness on sample surfaces.

•; Up to 8" wafer size
•; Microhead 5 - sr
•; Stylus tip (green): 2 um radius
•; Dual view optic (Top & side)
•; Lens : 6.4X , Magnification Range : 300X~1012X
•; OS: Windows XP
•; S/W: Ver 7.40.07
•; Repeatability : 6 Å;; or 0.1% (1 s),


*. Installed in Clean-room.
*. Can demonstrate any time.
       
  - 总公司: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
  - 电话: 82-41-554-6920~1 传真: 82-41-554-6922