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设备信息
设备名称 Tencor P-17 stylus surface profiler
型号 P-17 制造商 KLA TENCOR
晶元尺寸 8" Vintage 2017-6
销售状态 销售中 设备状态 Excellent
数据 [Features]
- Wafer size : up to 8 inch
- Microhead 5-xr (13, 131, 1048 um range)
- Stylus tip (green): 2um radius
- Objective lens : 6.4x, Magnification range : 173x~750x
- Step height: Nanometers to 1000µ;m
- Step height repeatability : 4 Å; ( 1σ, 1µ;m )
- Programmable stylus force from 0.5 –; 50mg (Option : 0.03 ~50mg )
- Scan full diameter of the sample without stitching for bow and film stress measurement
- Fully motorized 200mm XY stage, Z stage, 360° theta stage and level stage
- Dual view optics ( side and top )
- Fully automated with sequencing, pattern recognition
- OS : Windows 7, S/W : Profiler v8.0, Apex Advanced Analysis(Option)

[Applications]

- Step Height mesurement (2D/3D)
- Roughness and Waviness
- Bow and Shape
- Thin film Stress
- Defect review ( Defect surface topography)

*. To be refurbished.
*. Installed in Clean-room.
     
  - 总公司: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
   - 电话: 82-41-554-6920~1 传真: 82-41-554-6922