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设备信息
设备名称 MCV 2500 HG-CV System for EPI resistivity measurement
型号 MCV2500 制造商 SDI/SEMILAB
晶元尺寸 12" Vintage 2010-10
销售状态 销售中 设备状态 Refurbishing
数据 ■ Capable up to 12" Wafer
■ SSM 52 Capacitance Measurement Unit
■ Motor control unit
■ Pneumatic control Unit
■ PC System
■ PROCAP software
■ Performance
- CV Meter Noise Test (Schottky Diode Test): 1 STD(%) <0.167%
- MOS Wafer Area Test : 1 STD(%) <0.1%

■ Capacitance: 0 ~ 2000pF(1MHz), 1 ~ 20,000pF(100KHz)
■ Conductance: 0 ~ 2000μS
■ DC Bias voltage: ± 250V
■ Ramp Rate: 0 ~ 50 V/s continuously variable
■ Drive Signal Frequency at 1Mhz voltage=15mV rms
■ Stress Voltage: ± 250V
■ CDA: 80~100psi, Nitrogen for sample purge:0~15psi
■ Ambient temperature: 18° - 25°C ± 2°C over 24 hour period
   
  - 总公司: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
   - 电话: 82-41-554-6920~1 传真: 82-41-554-6922