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 HOME >设备信息 |
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设备信息
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设备名称
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SSM 530 HG-CV System for EPI resistivity measurement |
| 型号 |
SSM530 |
制造商 |
SOLID STATE MEASRUEMENT INC. |
| 晶元尺寸 |
12"
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Vintage |
2008-6 |
| 销售状态 |
销售中
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设备状态 |
Refurbished
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| 数据 |
■ Capable up to 12" Wafer
■ SSM 52 Capacitance Measurement Unit
■ Motor control unit
■ Pneumatic control Unit
■ PC System
■ PROCAP software
■ Performance
- CV Meter Noise Test (Schottky Diode Test): 1 STD(%) <0.167%
- MOS Wafer Area Test : 1 STD(%) <0.1%
■ Capacitance: 0.5~ 2000pF
■ Conductance: 0.5 ~ 2000μS
■ DC Bias voltage: ± 250V
■ Ramp Rate: 0 ~ 50 V/s continuously variable
■ Drive Signal Frequency at 1Mhz voltage=15mV rms
■Stress Voltage: ± 250V
■ CDA: 80~100psi, Nitrogen for sample purge:0~15psi
■ Ambient temperature: 18° - 25°C ± 2°C over 24 hour period |
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- 总公司:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- 电话:
82-41-554-6920~1 传真: 82-41-554-6922
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