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设备信息
设备名称 Tencor P-15 Step Height Measurement System
型号 P-15 制造商 KLA TENCOR
晶元尺寸 8" Vintage 2002-8
销售状态 销售中 设备状态 Excellent
数据 - Long Scan Profiler P-15 Measurement.
- Micro Head II SR
- Stylus Tip (Green): 2um radius
- Measurement Range: 13㎛,65㎛,327㎛.
- Scan Length: 205mm.
- Scan Speed : 1㎛ ~ 25 mm/sec.
- Stylus Force: 1 ~50mg.
- Motorized X-Y stage (max sample size:254x254mm).
- Pentium III 733MHz, Ram 256MB & 19" LCD Color Monitor, Windows NT 4.0
- S/W Version : 6.41
- Utility: Vacuum.
- Power: 220V/50HZ, 4A.
- Installed in Clean-room.
- Can demonstrate any time.
  - 总公司: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
  - 电话: 82-41-554-6920~1 传真: 82-41-554-6922