|
|
|
|
|
 HOME >设备信息 |
|
设备信息
|
|
设备名称
|
Tencor / Prometrix RS 35 4PP |
| 型号 |
RS 35 |
制造商 |
PROMETRIX |
| 晶元尺寸 |
8"
|
Vintage |
1992-11 |
| 销售状态 |
销售中
|
设备状态 |
Excellent
|
| 数据 |
*. Process: wafer Sheet Resistance measurement
*. Measurement perfomance:
- 4 Point Probe check surface on Silicon wafer
- Measurement range <5 mohm/sq to > 5 Megohm/sq
- Routine check 1-30 sites programmable
- Counter/ 3-D map, Diameter scan 49,81,121,225,361,441,625 sites
- XY map up to 1200 sites programmable
*. Measurement Specifications
- Measurement repeatability <0.2% ( 1 Sigma)
- Absolute accuracy based on NIST(NBS) standard wafers +-1% of NIST certified range
*. Hardware configuration:
- Radial Stage and Probe head Assembly
- Electronics Card Cage ( CPU and I/O Chanel, Motor Controller, Display I/O, RS232 Part..)
- Diagnostics Pannel
- DC Power supply
- Operator Console with keyboard
*. Wafer Size: 2"~ 8"
*. Software configuration:
- Operation Software: StatTrax
*. Utility & power
- power requirements 115v 50/60hz
- Required compressed Air 80 ~100 PSI , Vacuum : 25 mmHg
*. Installed in Clean-room |
|
|
|
|
|
- 总公司:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- 电话:
82-41-554-6920~1 传真: 82-41-554-6922
|
|
|
