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 HOME >设备信息 |
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设备信息
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设备名称
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Nanometrics Nanospec 9300 Thin Film Thickness Measurement |
| 型号 |
Nanospec 9300 |
制造商 |
NANOMETRICS |
| 晶元尺寸 |
12"
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Vintage |
2002-6 |
| 销售状态 |
销售中
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设备状态 |
Operational
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| 数据 |
Currently 12" configured (It can be modified for 8" open cassette handling)
Spectroscopic Reflectometer (SR)
Two optical light sources
Visable tungsten halogen lamp
UV deuterium arc lamp
Lens 4x,15x (Visible & UV)
System Computer & LCD Monitor
Windows XP-based N2000 metrology software(Version N2000 4.2.90 Beta)
Head Type : UV DIO
Video camera : RS170(B/W)
Wafer Handling
Kensington Robot & Stage
Asyst FOUP 300mm
Input power
208VAC 18A 50/60Hz
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- 总公司:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- 电话:
82-41-554-6920~1 传真: 82-41-554-6922
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