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Àåºñ¸í N&K 1700 Trench Depth & Thin film thickness Measurement
¸ðµ¨¸í N&K 1700 Á¦Á¶»ç N&K
¿þÀÌÆÛ»çÀÌÁî 6" Vintage -
¸Å¸Å»óÅ ÆǸÅÁß Àåºñ»óÅ Operational
Á¦¿ø *. Film Thickness and Trench profile measurement.
*. Manual load Metrology system.
*. Wafer: 4", 6", 8".
*. Spotsize: 50um.
*. Simultaneously determine thickness, n and k in the spectral range of 190-1000nm, trench profile and provide non-destructive, real time, high throughput measurements directly on the device.
*. Manual & Install software.
*. Pattern recognition software.
*. Installed in Clean-room.
 
  - Ãæû³²µµ õ¾È½Ã µ¿³²±¸ ÅëÁ¤3·Î 3 (ÁÖ)Á¦³×½Ã½º ¿ì)31208 TEL: 041-554-6920~1 FAX: 041-554-6922