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Àåºñ¸í KLA-Tencor OSA 6100 Optical Defect Inspection
¸ðµ¨¸í OSA6100 Á¦Á¶»ç KLA TENCOR
¿þÀÌÆÛ»çÀÌÁî 6" Vintage 2006-9
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Á¦¿ø [ General Description ]
Wafer Size : 2 ~ 6 inch
Illumination Source : 25 mW laser, 405 nm wavelength
Operator Interface : Trackball and keyboard standard
Substrate Thickness : 350 ¥ìm ~ 1,100 ¥ìm
Substrate Material : Any clear or opaque polished surface


[ Performance ]
Defect Sensitivity 0.08 ¥ìm diameter PSL sphere equivalent > 95% capture rate(PSL on bare Si)
Other Defects and Applications : Particles, scratches, stains, pits, and bumps.
Sensitivity: Minimum detectable size for automatic defect classification:
- Scratches: 100 ¥ìm long, 0.1 ¥ìm wide, 50 Å;;; deep.
- Pits: 20 ¥ìm diameter, 50 Å;;; deep
- Stains: 20 ¥ìm diameter, 10 Å;;; thick

[ Application ]
- Disk substrates
 
  - Ãæû³²µµ õ¾È½Ã µ¿³²±¸ ÅëÁ¤3·Î 3 (ÁÖ)Á¦³×½Ã½º ¿ì)31208 TEL: 041-554-6920~1 FAX: 041-554-6922