Metrology
 
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Àåºñ¸í *Nanometrics Nanospec ATLAS Thin Film Thickness Measurement
¸ðµ¨¸í atlas Á¦Á¶»ç NANOMETRICS
¿þÀÌÆÛ»çÀÌÁî 8" Vintage -
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Á¦¿ø * Atlas is capable of housing up to five critical metrology technologies at one time.
- Spectroscopic reflectometer (SR)
- Spectroscopic ellipsometer (SE)
- Optical critical dimension (OCD)
- Diffraction based overlay (DBO)
- Wafer stress/bow

. Available for 200mm or 300mm wafer
. Dual Cassette Station
. LCD Touch Screen UI
. Kawasaki Robot with & Dual robot arm

. Key-Lock EMO buttons
. SECS II
. 3.5?Floppy Drive
. DVD-RW Drive
. CE Marked
. Power Requirements: 208~230V, 13A, PH 1, Freq 50/60Hz
  - Ãæû³²µµ õ¾È½Ã µ¿³²±¸ ÅëÁ¤3·Î 3 (ÁÖ)Á¦³×½Ã½º ¿ì)31208 TEL: 041-554-6920~1 FAX: 041-554-6922