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장비정보
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장비명
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Tencor P-10 Step Height Measurement System |
| 모델명 |
P-10 |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
8"
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Vintage |
1995-2 |
| 매매상태 |
판매중
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장비상태 |
Operational
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| 제원 |
- Standard Head with L(yellow) type stylus.
- Measurement Range: 13㎛,300㎛.
- Scan Length: 210mm.
- Scan Speed : 1㎛ ~ 25 mm/sec.
- Stylus Force: 1 ~100mg.
- Motorized X-Y stage (max sample size:254x254mm).
- Intel Pentium 233Mhz Ram:32MB , HDD: 2GB
- Utility: Vacuum.
- Power: 115V/50HZ, 4A.
- Installed in Clean-room. |
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