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장비정보
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장비명
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Nanometrics Nanospec 4150 Film Thickness Measurement |
| 모델명 |
NANOSPEC 4150 |
제조사 |
NANOMETRICS |
| 웨이퍼사이즈 |
8"
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Vintage |
- |
| 매매상태 |
판매중
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장비상태 |
Excellent
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| 제원 |
Wafer Size : Up to 200mm
Automatic Stage & Stage controller with twin chuck (4 ~ 8" wafer size)
UV lamp housing & Deuterium Lamp Power Supply
Auto focus : Not available (Image capture board to be repaired)
Wavelength : Visible 400~900nm , 200~900nm with UV (option)
Acuracy : Within ± 1% (Oxide Standard)
Precision : 2Å, 500~50,000Å Visible /1Å, 25~500Å UV option
Stability : 0.5% or 5Å or whichever is greater
Data analysis : Mapping contour 2D and 3D / Statistical Process Control (SPC) |
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