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Nanometrics Nanospec 6100UV Thin Film Thickness Measurement |
| ¸ðµ¨¸í |
NANAOSPEC 6100 |
Á¦Á¶»ç |
NANOMETRICS |
| ¿þÀÌÆÛ»çÀÌÁî |
8"
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Vintage |
2007-3 |
| ¸Å¸Å»óÅ |
ÆǸÅÁß
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Excellent
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| Á¦¿ø |
?Measurement Range : 25?- 20µm
- 500?-200 um with the visible light source (400 to 800nm halogen lamp)
- 25?- 500?with UV light source (210 - 400nm Deuterium lamp).
?Linear Array Head
?Automated focusing
?Joystick-automated stage with twin chuck ( 8inch, 6inch)
?CV -S3200 CCD Camera
?Objectives (Auto revolver) : Olympus 4X, 10X, 15X
?2D and 3D wafer-mapping software
?S/W Version : 1.63, OS : Windows 2000
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