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Tencor P-11 Step Height Measurement System |
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P-11 |
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KLA TENCOR |
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8"
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Vintage |
1996-7 |
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- Long Scan Profiler P-11 Measurement.
- Micro Head sr with L type stylus.
- Measurement Range: 13§,65§,327§.
- Scan Length: 205mm.
- Scan Speed : 1§ ~ 25 mm/sec.
- Stylus Force: 1 ~50mg.
- Motorized X-Y stage (max sample size:254x254mm).
- Pentium Celeron 533MHz, Ram 128MB & 17" LCD Color Monitor, Windows 3.1.
- Utility: Vacuum.
- Power: 110V/50HZ, 4A.
- Installed in Clean-room. |
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